摘要： An angular displacement measurement sensor with high resolution for large range measurement is presented. The design concept of the proposed method is based on the birefringence effect and phase detection of heterodyne interferometry. High system symmetry and simple operation can be easily achieved by employing an innovative sandwich optical design for the angular sensor. To evaluate the feasibility and performance of the proposed method, several experiments were performed. The experimental results demonstrate that our angular displacement measurement sensor can achieve a measurement range greater than 26°. Considering the high-frequency noise, the measurement resolution of the system is approximately 1.2° × 10 . Because of the common-path arrangement, our proposed method can provide superior immunity against environmental disturbances. 其他題名： Opt Express 出版者： United States 出版日期： 2016-04-04 出處： Optics express, 2016-04, Vol.24 (7), p.6802 資源來源： Optica Publishing Group Journals 識別號： ISSN: 1094-4087 識別號： EISSN: 1094-4087 識別號： DOI: 10.1364/OE.24.006802 識別號： PMID: 27136979
