Effect of fabrication parameters on the characteristics of fresnel lens and piezoelectric transducers

NCUIR > Engineering College > Departmant of Mechanical Engineering > journal & Dissertation > Item 987654321/108676

Please use this identifier to cite or link to this item: https://ir.lib.ncu.edu.tw/handle/987654321/108676

Title:	Effect of fabrication parameters on the characteristics of fresnel lens and piezoelectric transducers
Authors:	潘敏俊;Bui, Tuan-Anh;Pan, Min-Chun;Lee, Chien-Cheh;Shih, Wen-Ching
Contributors:	工學院機械工程學系
Keywords:	Aluminum;Deposition;Ferroelectric materials;Ferroelectrics;Focusing;Fresnel lens;Lenses;piezoelectric transducer;Piezoelectric transducers;Silicon;sputtering;Thin films;Transducers;ultrasonic focusing ejector;Zinc oxide;Zinc oxide (ZnO);Zinc oxides
Date:	2012-12-01
Issue Date:	2026-04-23 15:01:28 (UTC+8)
Publisher:	Taylor and Francis Ltd.;Philadelphia: Taylor & Francis Group
Abstract:	摘要： A two-mask fabrication process of a four-level Fresnel lens was used to evaluate its characteristics through investigating the effect of SU-8 photoresist on the profile of the focusing lens. A two-step deposition of ZnO films was applied to develop a feasible fabrication of a piezoelectric transducer with the structure Al/ZnO/Pt/Ti/SiO 2 /Si under reasonable conditions, which include deposition pressure of 0.7 Pa and 1.3 Pa, RF power of 100 W and 178 W, and sputtering gas ratio Ar:O 2 = 1:3 and 1:1 for first and second step deposition, respectively. Highly c-axis textured ZnO films were successfully obtained through two-step deposition process. 出版者： Philadelphia: Taylor & Francis Group 出版日期： 2012-01-01 出處： Ferroelectrics, 2012-01, Vol.437 (1), p.70-80 版權： Copyright Taylor & Francis Group, LLC 2012 版權： Copyright Taylor & Francis Ltd. 2012 識別號： ISSN: 0015-0193 識別號： EISSN: 1563-5112 識別號： DOI: 10.1080/00150193.2012.741941
Appears in Collections:	[Departmant of Mechanical Engineering ] journal & Dissertation

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