摘要： The induced optical aberration of laser beam passing through a transparent flowing fluid layer on a metal specimen is experimentally and empirical formula studied. The proposed study presents an experimental investigation of metal surface roughness measurement by combining an optical probe of laser-scattering phenomena and adaptive optics (AO) for aberration correction. In the absence of the AO correction scheme, induced flow velocity of 0.278 m/s can severely degrade the residual wavefront root mean square (RMS) error to 0.58 μm and decrease the scattered laser intensity. Real-time AO correction in closed-loop at a sampling rate of 8Hz can reduce the wavefront RMS error to 0.19 μm and improve the attenuation of scattered laser intensity. The maximum relative error of the estimated roughness ( R a ) is less than 7.8% compared with the stylus method. The experimental results show satisfactory correction in the presence of a flowing fluid layer using the AO system. 其他題名： OPT REV 出版者： Tokyo: Springer Japan 出版日期： 2013-09-01 出處： Optical review, 2013-09, Vol.20 (5), p.433-437 版權： The Optical Society of Japan 2013 識別號： ISSN: 1340-6000 識別號： EISSN: 1349-9432 識別號： DOI: 10.1007/s10043-013-0074-6
