摘要： A vibration structure with two-degrees-of-freedom is proposed to increase the usable bandwidth of a micromachined electromagnetic energy harvester. Compared with the structure of a pure cantilever harvester, the proposed structure is formed by integrating a spiral diaphragm into a U-shaped cantilever diaphragm. By performing finite element analysis, the resonance frequencies of the two diaphragms are designed with a slight shift, both lower than 300 Hz. In addition, to achieve output bandwidth broadening, electroplated copper coils on the spiral and the U-shaped cantilever are coupled and the connection sequences of the coupled coils are arranged such that single- or duo-mode tuning of the energy harvester can be realized. The harvester delivers powers of 22.1 and 21.5 nW at two resonance frequencies of 211 and 274 Hz, respectively, in the duo-mode operation. The proposed spiral-cantilever coupled energy harvester has lower resonance frequencies and broader bandwidth than a pure cantilever-type harvester of equal area, and can therefore harvest more energy from the environment. 其他題名： SMS 其他題名： Smart Mater. Struct 出版者： IOP Publishing 出版日期： 2016-09-01 出處： Smart materials and structures, 2016-09, Vol.25 (9), p.95047 資源來源： Institute of Physics Journals 版權： 2016 IOP Publishing Ltd 識別號： ISSN: 0964-1726 識別號： EISSN: 1361-665X 識別號： DOI: 10.1088/0964-1726/25/9/095047 識別號： CODEN: SMSTER
