Fabrication of new composite abrasive for jet machining and application to scrap wafer regeneration

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Title:	Fabrication of new composite abrasive for jet machining and application to scrap wafer regeneration
Authors:	顏炳華;Ke, J-H;Tsai, F-C;Hung, J-C;Yang, T-Y;Yan, B-H
Contributors:	工學院機械工程學系
Keywords:	Abrasive machining;Abrasives;Applied sciences;Coating;Composite materials;Electronics;Exact sciences and technology;Fracture mechanics (crack, fatigue, damage...);Fundamental areas of phenomenology (including applications);Mechanical engineering. Machine design;Microelectronic fabrication (materials and surfaces technology);Micromachining;Particulate composites;Physics;Regeneration;Scrap;Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices;Silicon carbide;Solid mechanics;Structural and continuum mechanics;Surface roughness;Thermoplastics
Date:	2012-01-01
Issue Date:	2026-04-23 15:11:01 (UTC+8)
Publisher:	SAGE Publications Inc.;London, England: SAGE Publications
Abstract:	摘要： This study develops a novel composite abrasive with better micro-machining properties for achieving improved surface roughness on hard brittle materials. The proposed composite abrasive is made of a thermoplastic polymer with polystyrene as the base material and has its surface thermally coated with SiC particles for abrasive jet machining (AJM). The optimal parameters for obtaining an even coating of abrasives on the polymer surface include coating temperature of 200°C and SiC particle size of #3000. Application of the new composite abrasive to AJM achieves enhancement in surface roughness. Being elastic and spherical, the composite abrasive can function as a buffer preventing direct impact on the workpiece, resulting in smaller, fewer, and shallower cracks. When applied to regeneration of scrap silicon wafers, the developed composite abrasive contributes to both improvement in surface roughness and shortening of the post-processing time required. 出版者： London, England: SAGE Publications 出版日期： 2012-02-01 出處： Proceedings of the Institution of Mechanical Engineers. Part E, Journal of process mechanical engineering, 2012-02, Vol.226 (1), p.3-11 版權： Authors 2011 版權： 2015 INIST-CNRS 版權： Copyright Professional Engineering Publishing Ltd Feb 2012 識別號： ISSN: 0954-4089 識別號： EISSN: 2041-3009 識別號： DOI: 10.1177/0954408911399353
Appears in Collections:	[Departmant of Mechanical Engineering ] journal & Dissertation

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