摘要： •An optical measurement system based on the light scattering method is used.•Rapid surface roughness measurement of Zr-based BMGs.•Integrated with real-time AO correction of aberrations.•Excellent correlation with a correlation coefficient (R2) of 0.9974.•Proposed system increase the precision of manufacturing processes for BMGs in situ. Bulk metallic glasses (BMGs) have received extensive attention recently due to amorphous-related extraordinary properties such as high strength, elasticity, and excellent corrosion resistance. In particular, Zr-based BMGs are recognized as a biocompatible material and surface roughness may affect many aspects of cell attachment, proliferation and differentiation. Therefore, this study presents an in-process measurement of surface roughness by combining an optical probe of laser-scattering phenomena and adaptive optics (AO) for aberration correction. Measurement results of six Zr-based BMGs samples with a roughness ranging from 0.06 to 0.98μm demonstrate excellent correlation between the peak power and average roughness with a determination coefficient (R2) of 0.9974. The proposed adaptive-optics-assisted (AO-assisted) system is in good agreement with the stylus method, and less than 8.42% error values are obtained for average sample roughness in the range of 0.05–0.58μm. The proposed system can be used as a rapid in-process roughness monitor/estimator to further increase the precision and stability of manufacturing processes for all classes of BMGs materials in situ. 出版者： Elsevier Ltd 出版日期： 2013-12-01 出處： Measurement : journal of the International Measurement Confederation, 2013-12, Vol.46 (10), p.4200-4205 版權： 2013 Elsevier Ltd 識別號： ISSN: 0263-2241 識別號： EISSN: 1873-412X 識別號： DOI: 10.1016/j.measurement.2013.07.034
