Littrow-type self-aligned laser encoder with high tolerance using double diffractions

NCUIR > Engineering College > Departmant of Mechanical Engineering > journal & Dissertation > Item 987654321/108945

Please use this identifier to cite or link to this item: https://ir.lib.ncu.edu.tw/handle/987654321/108945

Title:	Littrow-type self-aligned laser encoder with high tolerance using double diffractions
Authors:	李朱育;Wu, Chyan-Chyi;Hsu, Cheng-Chih;Lee, Ju-Yi;Chen, Yan-Zou;Yang, Jhih-Sheng
Contributors:	工學院機械工程學系
Keywords:	Displacement;Grating;Littrow;Long range
Date:	2013-06-15
Issue Date:	2026-04-23 15:16:59 (UTC+8)
Publisher:	Elsevier;Elsevier B.V
Abstract:	摘要： This study proposes a Littrow-type self-aligned laser encoder system (LisaLENS) with double diffractions. The LisaLENS has simple optical paths, facilitating alignment and manufacture, and fewer optical components than current laser encoders. This study analyzes the theoretical measurement resolution of this system and verifies the feasibilities of its long- and short-range measurements through experiments. Experimental results show that the LisaLENS has a resolution of 5.5±1.4nm. Thus, this design has wide applications in various fields, especially for monitoring the displacement and vibration of precision-motorized stages. 出版者： Elsevier B.V 出版日期： 2013-06-15 出處： Optics communications, 2013-06, Vol.297, p.89-97 資源來源： ScienceDirect 版權： 2013 識別號： ISSN: 0030-4018 識別號： EISSN: 1873-0310 識別號： DOI: 10.1016/j.optcom.2013.01.048
Appears in Collections:	[Departmant of Mechanical Engineering ] journal & Dissertation

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