Multi-interferometric displacement measurement system with variable measurement mirrors

NCUIR > Engineering College > Departmant of Mechanical Engineering > journal & Dissertation > Item 987654321/108972

Please use this identifier to cite or link to this item: https://ir.lib.ncu.edu.tw/handle/987654321/108972

Title:	Multi-interferometric displacement measurement system with variable measurement mirrors
Authors:	董必正;Chang, Chung-Ping;Tung, Pi-Cheng;Shyu, Lih-Horng;Wang, Yung-Cheng;Manske, Eberhard
Contributors:	工學院機械工程學系
Keywords:	Calibration
Date:	2013-06-10
Issue Date:	2026-04-23 15:18:32 (UTC+8)
Publisher:	The Optical Society;United States
Abstract:	摘要： Laser interferometers have been widely implemented for the displacement sensing and positioning calibration of the precision mechanical industry, due to their excellent measuring features and direct traceability to the dimensional definition. Currently some kinds of modified Fabry-Perot interferometers with a planar mirror or a corner cube prism as the measurement mirror have been proposed. Each optical structure of both models has the individual particularity and performance for measuring applications. In this investigation, a multi-interferometric displacement system has been proposed whose measurement mirror can be quickly and conveniently altered with a planar mirror or a corner cube reflector depending on the measuring demand. Some experimental results and analyses about the interpolation error and displacement measurements with both reflectors have been demonstrated. According to the results, suggestions about the choice of a measuring reflector and interpolation model have been presented. With the measuring verifications, the developed system with a maximum standard deviation less than 0.2081 μm in measuring range of 300 mm would be a compact and robust tool for sensing or calibrating the linear displacement of mechanical equipment. 其他題名： Appl Opt 出版者： United States 出版日期： 2013-06-10 出處： Applied optics (2004), 2013-06, Vol.52 (17), p.3902-3909 資源來源： Optica Publishing Group Journals 識別號： ISSN: 1559-128X 識別號： EISSN: 2155-3165 識別號： EISSN: 1539-4522 識別號： DOI: 10.1364/AO.52.003902 識別號： PMID: 23759837
Appears in Collections:	[Departmant of Mechanical Engineering ] journal & Dissertation

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