摘要： We present an in-process measurement of surface roughness by combining an optical probe of laser-scattering phenomena and adaptive optics for aberration correction. Measurement results of five steel samples with a roughness ranging from 0.2 to 3.125 μm demonstrate excellent correlation between the peak power and average roughness with a correlation coefficient (R(2)) of 0.9967. The proposed adaptive-optics-assisted system is in good agreement with the stylus method, and error values of less than 8.7% are obtained for average sample roughness in the range of 0.265 to 1.119 μm. The proposed system can be used as a rapid in-process roughness monitor/estimator to further increase the precision and stability of manufacturing processes in situ. 其他題名： Opt Lett 出版者： United States: Optica Publishing Group 出版日期： 2012-03-01 出處： Optics Letters, 2012-03, Vol.37 (5), p.848--850 資源來源： Optica Publishing Group Journals 版權： 2012 Optical Society of America 識別號： ISSN: 0146-9592 識別號： ISSN: 1539-4794 識別號： EISSN: 1539-4794 識別號： DOI: 10.1364/ol.37.000848 識別號： PMID: 22378414
