Three-dimensional numerical simulation of flow, thermal and oxygen distributions for a Czochralski silicon growth with in a transverse magnetic field

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題名:	Three-dimensional numerical simulation of flow, thermal and oxygen distributions for a Czochralski silicon growth with in a transverse magnetic field
作者:	陳志臣;Chen, Jyh-Chen;Chiang, Pei-Yi;Chang, Ching-Hsin;Teng, Ying-Yang;Huang, Cheng-Chuan;Chen, Chun-Hung;Liu, Chien-Cheng
貢獻者:	工學院機械工程學系
關鍵詞:	3D Numerical simulation;Computer simulation;Cross-disciplinary physics: materials science;rheology;Crystals;Czochralski crystal growth;Czochralski process;Exact sciences and technology;Growth from melts;zone melting and refining;Magnetic fields;Materials science;Mathematical models;Methods of crystal growth;physics of crystal growth;Oxygen concentration;Physics;Semiconductor silicon;Silicon;Theory and models of crystal growth;physics of crystal growth, crystal morphology and orientation;Three dimensional;Transverse magnetic field;Variability
日期:	2014-09-01
上傳時間:	2026-04-23 15:31:01 (UTC+8)
出版者:	Elsevier;Amsterdam: Elsevier B.V
摘要:	摘要： A three-dimensional numerical simulation has been performed to understand the motion of the melt flow and thermal field during the Czochralski silicon single crystal growth process under the influence of a transverse magnetic field. With the application of a transverse magnetic field, the velocity, temperature and oxygen concentration fields in the melt become three-dimensional and asymmetric. Stronger downward flow motion is formed under the melt-crystal interface which can prevent the movement of oxygen impurities towards the melt-crystal interface. This may explain why the presence of a transverse magnetic field decreases the oxygen concentration level along the melt–crystal interface. The uniformity of the oxygen concentration at the melt–crystal interface is also improved when the magnetic field is applied. There is an increase in either the crystal diameter or the crucible rotation rate, and the oxygen concentration level becomes greater. The uniformity of oxygen concentration is better for higher crystal diameters. •We analyzed 3D effects of a transverse magnetic field on CZ method.•The physical mechanisms of the 3D flow motion during TMCZ had been showed.•We clarify the transport behavior of oxygen impurity under a TMF.•The oxygen increases for higher crystal diameters and crucible rotation rates.•The uniformity of oxygen concentration is better for higher crystal diameters. 出版者： Amsterdam: Elsevier B.V 出版日期： 2014-09-01 出處： Journal of crystal growth, 2014-09, Vol.401, p.813-819 版權： 2014 Elsevier B.V. 版權： 2015 INIST-CNRS 識別號： ISSN: 0022-0248 識別號： EISSN: 1873-5002 識別號： DOI: 10.1016/j.jcrysgro.2014.01.028 識別號： CODEN: JCRGAE
顯示於類別:	[機械工程學系] 期刊論文

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