Wide-band gap ZnO semiconductors are attractive materials for the investigation of microcavity exciton polaritons due to the large exciton binding energy and oscillator strength. We report the growth and characterization of bulk ZnO-based hybrid microcavity. The phenomenon of strong exciton-photon coupling at room temperature has been observed in the ZnO-based hybrid microcavity structure, which consists of 30 pair epitaxially grown AlN/AlGaN distributed Bragg reflector (DBR) on the bottom side of the 3/2 lambda thick ZnO cavity and 9 pair SiO2/HfO2 DBR as the top mirror. The cavity quality factor is about 221. The experimental results show good agreement with theoretically calculated exciton-polariton dispersion curves based on transfer matrix method. From the theoretical and experimental exciton-polariton dispersion curves with two different cavity-exciton detuning values, the large vacuum Rabi splitting is estimated to be about 58 meV in the ZnO-based hybrid microcavity.
