Dual-frequency heterodyne ellipsometer for characterizing generalized elliptically birefringent media

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题名:	Dual-frequency heterodyne ellipsometer for characterizing generalized elliptically birefringent media
作者:	Yu,CJ;Lin,CE;Li,YC;Chou,LD;Wu,JS;Lee,CC;Chou,C
贡献者:	光電科學研究所
关键词:	QUARTZ WAVE PLATE;OPTICAL-SYSTEMS;LASER;RETARDATION;CALCULUS;RETARDER;MATRIX
日期:	2009
上传时间:	2010-06-29 19:41:11 (UTC+8)
出版者:	中央大學
摘要:	This research proposed a dual-frequency heterodyne ellipsometer (DHE) in which a dual-frequency collinearly polarized laser beam with equal amplitude and zero phase difference between p-and s-polarizations is setup. It is based on the polarizer-sample-analyzer, PSA configuration of the conventional ellipsometer. DHE enables to characterize a generalized elliptical phase retarder by treating it as the combination of a linear phase retarder and a polarization rotator. The method for measuring elliptical birefringence of an elliptical phase retarder based on the equivalence theorem of an unitary optical system was derived and the experimental verification by use of DHE was demonstrated too. The experimental results show the capability of DHE on characterization of a generalized phase retardation plate accurately. (C) 2009 Optical Society of America
關聯:	OPTICS EXPRESS
显示于类别:	[光電科學研究所] 期刊論文

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