本研究之主要目的是研發之ㄧ種碳化鎢之微型球狀研磨工具的複合成形法，再藉其進行精密微凹型球狀模穴加工，以提昇國內相關產業在精微模具方面的製作技術。一般而言，利用WEDG線放電研磨法修整電極，可使工具電極承受較小的應力且可兼顧電極本身的硬度與韌性，防止電極之破損或彎曲，但目前為止絕大多數的研究均以圓柱、三角柱、四方柱及針狀等微細工具電極為主要成形目的，鮮少有以微軸前端呈球狀且將其作成微研磨工具為目的之研究。本研究利用微放電的方法製作成直徑110μm之微球狀電極，並配合複合電鍍沉積技術開發出微球狀研磨工具，期能應用於目前工業界所需精微且複雜化模具表面之研磨，以提高微小產品高精度且低粗糙度之表面品質。 實驗結果顯示，當以電極轉速為0rpm、電流3A、脈衝時間40μs進行微球狀電極成形加工時，可獲得較佳之球狀電極，並將此球狀電極搭配電流密度7 A dm-2、轉速15rpm、電鍍時間3min、在磨料添加量10g/L的電鍍液中進行複合電鍍沉積時可獲得較佳的微型球狀刀具。若利用此微球狀刀具進給速度5μm的條件下，搭配游離磨料對工件進行微凹穴精微研磨加工時，可得到極光滑的凹型球狀模穴，該模穴的粗糙度值可達0.353μm Rmax（0.0398μm Ra）的鏡面狀態。 This paper presents a novel process using electro-discharge-machining combined with co-deposited Ni-diamond composites to build a unique micro-spherical tool tested for machining a micro cavity. During processing, a micro tool is built by wire electro-discharge grinding, spherical forming, electrochemical machining and co-deposition. The tungsten carbide material is used as the tool substructure. The experimental result shows electro-discharge-machining combined with co-deposition can successfully build a unique micro-spherical diamond tool that the suitable parameters gained for building micro-spherical tools in spherical forming are a peak current of 3 A, pulse duration of 40 μs and spindle rotational speed of 0 rpm in air; in Ni-diamond co-deposition are: current density of 7 A dm-2, diamond particle size of 3 μm, diamond particle concentration of 10 g l-1 and rotational speed of 15 rpm. When using this method, the micro tool has a better geometric shape, uniform particle distribution and suitable particle adhesion quantity. Then, a micro-spherical cavity is tested to machine in 6061 aluminum plate, the roughness 0.353μm Rmax (0.039μm Ra) is obtained using the tool feed adopts as 5μm/min with free abrasive in micro-grinding
