Electrical and optical properties of TiO2-doped ZnO films prepared by radio-frequency magnetron sputtering

NCUIR > Engineering College > Graduate Institute of Mechanical Engineering > journal & Dissertation > Item 987654321/30310

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Title:	Electrical and optical properties of TiO2-doped ZnO films prepared by radio-frequency magnetron sputtering
Authors:	Chung,Jeng-Lin;Chen,Jyh-Chen;Tseng,Chung-Jen
Contributors:	機械工程研究所
Keywords:	ZINC-OXIDE-FILMS;CHEMICAL-VAPOR-DEPOSITION;THIN-FILMS;RF;CONDUCTION;BAND;TI
Date:	2008
Issue Date:	2010-07-06 16:16:32 (UTC+8)
Publisher:	中央大學
Abstract:	TiO2-doped zinc oxide (ZnO) films were prepared by radio frequency (RF) magnetron sputtering in argon gas. The electrical and optical properties in the TiO2-doped ZnO films as functions of the TiO2 content were investigated. It was observed that the (002)
Relation:	JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS?
Appears in Collections:	[Graduate Institute of Mechanical Engineering] journal & Dissertation

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