Visualization of the effect of liquid dispensing method during spin coating

NCUIR > Engineering College > Graduate Institute of Mechanical Engineering > journal & Dissertation > Item 987654321/30545

Please use this identifier to cite or link to this item: http://ir.lib.ncu.edu.tw/handle/987654321/30545

Title:	Visualization of the effect of liquid dispensing method during spin coating
Authors:	Huang,Kuo-Hsin;Chou,Fu-Chu;Yang,Cheng-Pin
Contributors:	機械工程研究所
Keywords:	ROUGH ROTATING-DISK;FINGERING INSTABILITY;FLOW;FILM;REDUCTION;MODEL
Date:	2007
Issue Date:	2010-07-06 16:21:45 (UTC+8)
Publisher:	中央大學
Abstract:	In this study, we investigate how the method of liquid dispensing, including released drop, centered injection and spiral injection, affects the coating efficiency during spin coating processes. The flow visualization indicates that the method of liquid d
Relation:	JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS
Appears in Collections:	[Graduate Institute of Mechanical Engineering] journal & Dissertation

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