電化學（Electrochemical Machining，簡稱ECM）擁有加工速度快、刀具電極不易損壞、加工材料不受硬度限制、無表面應力及表面粗糙度佳的優勢，再加上及短脈衝相輔，能使精度達到數微米，此方法具有極大的發展潛力。本文利用單一因子法針對鑽孔與側邊加工進行研究，其變因包括:操作電壓、頻率、脈衝放電時間、加工深度、進給速度、特性吸附，並分析各項變因與加工精度之關係。最後由刀具電極直徑50μm製作出孔徑約70μm成品和溝槽寬度約60μm的成品。 Electrochemical Machining (ECM) has numerous advantages, such as high metal removal rate, no tool wear, regardless of material hardness, no surface stress on the workpiece and good surface roughness. Furthermore, by using ultra short pulses, the machining precision can even reach several micrometers and make this method a great developing potential. In this paper, the single factor method was used to analyze the influences of machining parameters, including electrolyte concentration, applied voltage, pulse frequency, pulse duration, hole depths, tool electrode feed rates and ions specifically adsorbed, On the micro electrochemical drilling and side cutting. Finally, a micro-hole with 70μm diameter and a micro-channel with 60μm width were fabricated by using a WC tool electrode of 50μm diameter.
