Error analysis of a simple and accurate optical coherent ellipsometer

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Title:	Error analysis of a simple and accurate optical coherent ellipsometer
Authors:	Nee,Soe-Mie F.;Yu,Chih-Jen;Wu,Jheng-Syong;Huang,Hong-Sheng;Chou,Chien
Contributors:	光電科學與工程學系
Keywords:	NULL ELLIPSOMETRY;DEPOLARIZATION;SCATTERING;CRYSTAL;LASER
Date:	2008
Issue Date:	2010-07-07 14:06:18 (UTC+8)
Publisher:	中央大學
Abstract:	The polarization modulation of optical coherent ellipsometry (OCE) is provided by the coupling between two highly correlated orthogonal polarizations with slightly different frequencies. Error of the sample-analyzer (SA) OCE is analyzed using the Stokes-M
Relation:	PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE
Appears in Collections:	[光電科學與工程學系] 期刊論文

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