| 題名: | Polarization modulation imaging ellipsometry for thin film thickness measurement |
| 作者: | Chou,Chien;Teng,Hui-Kang;Yu,Chih-Jen;Huang,Hong-Sheng |
| 貢獻者: | 光電科學與工程學系 |
| 關鍵詞: | PARAMETERS MEASUREMENT;OPTICAL HETERODYNE;NULL ELLIPSOMETER;ROTATING ANALYZER;PHASE;INTERFEROMETRY;POLARIMETRY;ERROR |
| 日期: | 2007 |
| 上傳時間: | 2010-07-07 14:08:53 (UTC+8) |
| 出版者: | 中央大學 |
| 摘要: | A polarization modulation (PM) imaging ellipsometer is proposed and setup in order to measure precisely the thickness of thin film. Five images are collected sequentially by CCD camera with respect to five pre-determined azimuth angles of a quarter wave p |
| 關聯: | OPTICS COMMUNICATIONS |
| 顯示於類別: | [光電科學與工程學系] 期刊論文
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