Optical monitoring and real time admittance loci calculation through polarization interferometer

NCUIR > Research Center > Thin Film Technology Center > journal & Dissertation > Item 987654321/35662

Please use this identifier to cite or link to this item: http://ir.lib.ncu.edu.tw/handle/987654321/35662

Title:	Optical monitoring and real time admittance loci calculation through polarization interferometer
Authors:	Lee,Cheng-Chung;Wu,Kai;Chen,Sheng-Hui;Ma,Sheng-Ju
Contributors:	薄膜技術研究中心
Keywords:	COATINGS
Date:	2007
Issue Date:	2010-07-07 15:47:22 (UTC+8)
Publisher:	中央大學
Abstract:	A simple, low coherence, vibration insensitive, polarization Fizeau interferometer is employed in this novel optical monitoring system proposed to extract the temporal phase change of the reflection coefficient of the growing film stacks. This system can
Relation:	OPTICS EXPRESS
Appears in Collections:	[薄膜技術研究中心] 期刊論文

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