| 題名: | TiO2-Ta2O5 composite thin films deposited by radio frequency ion-beam sputtering |
| 作者: | Lee,Cheng-Chung;Tang,Chien-Jen |
| 貢獻者: | 薄膜技術研究中心 |
| 關鍵詞: | TIO2-SIO2 MIXED FILMS;OPTICAL-PROPERTIES;OXIDE-FILMS;INTRINSIC STRESS;COEVAPORATION;CONSTANTS |
| 日期: | 2006 |
| 上傳時間: | 2010-07-07 15:47:48 (UTC+8) |
| 出版者: | 中央大學 |
| 摘要: | TiO2-Ta2O5 composite films were prepared by a radio frequency ion-beam sputtering deposition process, and the refractive indices and extinction coefficients of the composite films were found to be between those of the TiO2 and Ta2O5 films. The structure o |
| 關聯: | APPLIED OPTICS |
| 顯示於類別: | [薄膜技術研究中心] 期刊論文
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