Microstructure related properties of lanthanum fluoride films deposited by molybdenum boat evaporation at 193 nm

NCUIR > Research Center > Thin Film Technology Center > journal & Dissertation > Item 987654321/35684

Please use this identifier to cite or link to this item: http://ir.lib.ncu.edu.tw/handle/987654321/35684

Title:	Microstructure related properties of lanthanum fluoride films deposited by molybdenum boat evaporation at 193 nm
Authors:	Liu,MC;Lee,CC;Kaneko,M;Nakahira,K;Takano,Y
Contributors:	薄膜技術研究中心
Keywords:	COATING MATERIALS;OPTICAL COATINGS;THIN-FILMS;ULTRAVIOLET;MGF2;GROWTH;LAF3
Date:	2005
Issue Date:	2010-07-07 15:47:54 (UTC+8)
Publisher:	中央大學
Abstract:	Single layer lanthanum fluoride (LaF3) at 193 nm was deposited by a molybdenum boat evaporation process. Various microstructures that formed under different substrate temperatures and with deposition rates were investigated. The relation between these mic
Relation:	THIN SOLID FILMS
Appears in Collections:	[Thin Film Technology Center] journal & Dissertation

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