熱滾軋製程是一種高效率的製程，其具有的加工連續的特性可將微結構複製於高分子薄膜上，因此在高分子薄膜應用於微流體的概念上開闢了新機遇，而使用薄膜於滾軋製程中，其具有靈活的基板有卷到卷加工的優勢，這樣可以生產出具有潛力與非常便宜的產品，因此在近期滾軋壓印製造微米應用部分受到相當的重視，在本文中我們研究開發附有微米尺寸幾何圖騰的滾軋輪，並利用黃光製程製作滾軋模，文本討論了影響製程參數，主要包括滾軋壓力、溫度和速率，藉由以上不同参數對於加熱滾軋後聚合材料所產生的形貌特徵，可以獲得製程運作中所產生熱變形與剪應力變形的細微關係，此外，關鍵的因素可能會影響轉印成品的精確度，因此藉由以上參數和形貌進行了探討，其主要目標是實現製程最佳化。最後利用滾軋製程所製作微流體晶片進行微混合進行了可行性評估。 The hot roller embossing is an efficient process to continuously imprint microstructures on polymer film. Therefore, the concept of using hot roller to replicate polymer film opens up new opportunities in microfluidics application； In addition, hot roller embossing process present several advantages of making flexible polymer film in reel-to-reel format to increase throughput and reduce fabrication cost. Therefore, applying hot roller embossing to fabricate micro-parts draws lots of research interests in recent years. In this thesis, we demonstrated the development of the embossing roll with geometries stamps of micron scales and we tried to employ the embossing roll mould by using the lithography process. The thesis discusses the effects of process parameters such as roller embossing temperature, loading force and rolling speed to the resulting polymer film morphology and depth variation from thermal deformation and shear stress deformation. An optimized process parameter was also investigated from the systematic process parameter research. Finally, a micromixer design was demonstrated to evaluate the hot roller embossing process feasibility in microfluidic application.
