即時影像引導連續式微電鍍之立體微結構製作研究; Research on Real-time Image Processing Guided Micro-Anode Electroplating for fabrication of three-dimensional microstructure

NCUIR > Engineering College > Graduate Institute of opto-Mechatronics > Electronic Thesis & Dissertation > Item 987654321/47520

Please use this identifier to cite or link to this item: http://ir.lib.ncu.edu.tw/handle/987654321/47520

Title:	即時影像引導連續式微電鍍之立體微結構製作研究;Research on Real-time Image Processing Guided Micro-Anode Electroplating for fabrication of three-dimensional microstructure
Authors:	邱永傑;Yong-Jie Ciou
Contributors:	光機電工程研究所
Keywords:	銅金屬微米結構;即時影像處理;陽極導引電鍍;局部電化學沉積;雙CCD影像監控;Real-time image processing;Micro-anode guided e
Date:	2011-08-15
Issue Date:	2012-01-05 11:21:27 (UTC+8)
Abstract:	本研究主要目的為發展一結合即時影像擷取、影像處理及定位控制技術之系統，並將此系統運用在微陽極導引電鍍製程(Micro-Anode Guid Electroplating, MAGE)中，以製備三維複雜形狀之銅金屬微結構物(微米彈簧)，並探討透過控制在微結構物上進行局部電化學反應的表面區域，對沉積之微米銅金屬結構物形貌之影響。本研究以微陽極導引電鍍製程為基礎增設雙CCD影像監控系統，藉由此系統擷取電化學反應之影像，將影像透過處理定位微陽極及微結構物之位置，以此資訊控制微陽極頭之運動路徑。本研究成果顯示以「即時影像導引連續式微電鍍」系統所製作之微結構表面平整，柱體粗細均勻，且能控制三維微結構物之形貌。 The purpose of this research is to develop an image based positioning controller for the Micro-Anode Guided Electroplating (MAGE) system. It is show by experiments that this controller successfully improves the quality of three-dimensional complex micro-structure planting process. Furthermore, in addition to traditional two dimensional objects, this image guided MAGE system is also with the ability to manufacture complex three-dimensional objects such as stress-less springs.
Appears in Collections:	[Graduate Institute of opto-Mechatronics] Electronic Thesis & Dissertation

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