本論文我們主要討論小角度PN接面的崩潰特性。透過90°接面模型的方法導出我們所要討論的小角度模型。以崩潰特性而言,我們期望小角度的特性與原始的模性是相同的,所以我們比較各種角度與相異半徑的差異,用來佐證並加強我們所提出的理論合理性,其中我們也比較了小角度設定的差異性,方格誤差特性也是我們論文中所討論的一個重點。這說明了並非所有小角度的設定所造成的誤差都是我們所可以接受的範圍。最後我們利用模擬結果與時間的差異強化我們所提出的理論,並強調其優勢。 In this thesis, the major discussion is the small angle method in PN junction. The small angle model comes from 90° junction type of a full circular junction. For breakdown analysis, the result from the small angle method is the same as that from the original 90°junction method. The small angle method is verified for its validity by the test with different radii and different angles. The simulation result is not accepted if the angle is too small and the number of square meshes is insufficient. Finally, the comparison on the breakdown voltage and the CPU time between two methods shows that the small angle method is excellent in reducing the CPU time without increasing the programming complexity.