本子計畫係針對微型慣性感測元件之光路分光處理單元研製，由於一般的光學讀取系統體積較大，且各個光學元件在組裝後相對的穩定性不好，為了克服這些問題，微型化與積體化是解決的方案之ㄧ。因此本計畫目的是要發展一高穩定性、高靈敏度、微型化的extrinsic Fabry-Perot interferometer(EFPI) 慣性感測元件之光學讀取系統。利用 Fabry-Perot 干涉技術及多通道窄帶濾光片設計，以LED 作為偵測光源，可研發出具有體積小、速度快、靈敏度高、可靠度高、性能佳、環境適應性強等優點之光路分光處理單元。此外將利用SiO2 on Silicon 光波導製程技術，取代原光纖光路設計，作為微型慣性感測元件的光學訊號傳輸路徑，以確保元件組裝精確度，並利於未來並提升抗震封裝設計，以混成積體化(Hybrid Integration)方式，將光學次系統及電氣次系統整合在此矽光學平台，構成完整的光電系統晶片。 This is a proposal regarding the research of the optical signal filtering and processing system for optical micro accelerometer. It is the subproject II of the research of optical micro accelerometer. Traditionally, the size of the optical signal filtering and processing systems is big and complicated. Most of them with large volume which will affect the bad stability after the module assembled in the hall system. Miniaturization and integration are good solutions to overcome the disadvantage. In this research an optical signal filtering and processing system for optical micro accelerometer will be developed using extrinsic Fabry-Perot interferometer (EFPI). The system will be including high stabilization, high sensitivity. To achieve the purpose, we will develop the white light EFPI for optical micro accelerometer with high stability, high sensitivity, and miniaturization. Based on the techniques of the Fabry-Perot interferometry and the multi-channel narrow-band-pass filter, we will apply a white light LED to be the detecting source of the EFPI. Besides, the optical waveguide with SiO2 on Silicon technique will be applied to replace optical fiber to make sure the fast sensing speed, high sensitivity, high stability, and high quality, and good adaptability. Finally, the optical and electrical systems will be integrated using hybrid integration technique to construct the optical signal filtering and processing system 研究期間：10001 ~ 10012
