Microstructure and optical properties of Al(2)O(3) prepared by oblique deposition using microsphere shell templates

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Title:	Microstructure and optical properties of Al(2)O(3) prepared by oblique deposition using microsphere shell templates
Authors:	Cho,WH;Lee,CT;Yu,CC;Kei,CC;Liu,DR;Lee,CC
Contributors:	薄膜技術中心
Keywords:	GLANCING-ANGLE DEPOSITION;THIN-FILMS;NANOSPHERE LITHOGRAPHY;HUMIDITY SENSORS;FABRICATION;INDEX;ARRAY
Date:	2011
Issue Date:	2012-03-27 17:50:17 (UTC+8)
Publisher:	國立中央大學
Abstract:	We fabricated an orderly inclined Al(2)O(3) column array using a hollow microsphere template. The microstructure and optical properties were investigated with scanning electron micrography and a UV/VIS spectrometer, respectively. Microsphere shell templates were formed using atomic layer deposition to prevent the melting of polystyrene microspheres during the following high-temperature deposition process. An inclined Al(2)O(3) column array with a 30 degrees tilt angle was grown by oblique deposition on a substrate with a 75.5 degrees tilt angle with respect to the substrate normal. Birefringence and photonic crystalline behavior can be observed in the orderly inclined column array. The difference in the refractive indices between the p and s polarizations of the orderly inclined Al(2)O(3) column array was about 0.1. The photonic properties of the crystal were enhanced compared to those of substrates without patterns. (C) 2011 Optical Society of America
Relation:	APPLIED OPTICS
Appears in Collections:	[Thin Film Technology Center] journal & Dissertation

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