| Title: | Effect of thermal annealing on the optical properties and residual stress of graded-index-like films deposited by radio-frequency ion-beam sputtering |
| Authors: | Tang,CJ;Jaing,CC;Lee,KH;Lee,CC |
| Contributors: | 光電科學與工程學系 |
| Keywords: | RUGATE FILTERS;THIN-FILMS;COATINGS |
| Date: | 2011 |
| Issue Date: | 2012-03-27 18:15:57 (UTC+8) |
| Publisher: | 國立中央大學 |
| Abstract: | Composite films of Ta-Si oxide and graded-index-like films have been realized by using radio-frequency ion-beam sputtering. The influence of thermal annealing on the optical properties and residual stress of single-layer composite films and graded-index-like films has been studied. The residual stress and optical properties of both types of films were more stable than that of the notch filters fabricated from a series of discrete quarter-wave layers made by alternatively stacking high and low index materials after annealing. (C) 2010 Optical Society of America |
| Relation: | APPLIED OPTICS |
| Appears in Collections: | [Department of Optics and Photonics] journal & Dissertation
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