Optimization and comparison of photonic crystal resonators for silicon microcantilever sensors

NCU Institutional Repository > 理學院 > 光電科學與工程學系 > 期刊論文 > Item 987654321/51049

jsp.display-item.identifier=請使用永久網址來引用或連結此文件: http://ir.lib.ncu.edu.tw/handle/987654321/51049

题名:	Optimization and comparison of photonic crystal resonators for silicon microcantilever sensors
作者:	Trong,TM;Hsiao,FL;Lee,C;Xiang,WF;Chen,CC;Choi,WK
贡献者:	光電科學與工程學系
关键词:	SCANNING FORCE MICROSCOPY;OPTICAL MICROCAVITIES;PZT MICROCANTILEVERS;DROP FILTERS;LABEL-FREE;CANTILEVER;NANOCAVITY;LIGHT
日期:	2011
上传时间:	2012-03-27 18:16:44 (UTC+8)
出版者:	國立中央大學
摘要:	Microcantilever sensors have been known as a fundamental design used in force sensors, strain sensors and biochemical sensors. The fast-growing applications in nanoelectromechanical systems (NEMS) lead to strong demands in new sensing mechanism in order to downsize the sensing elements to nanometer scale. Photonic crystal (PC) based resonators have been investigated as promising solutions because the bandgap structure and resonator characteristics are extremely sensitive to the deformation and position shift of holes in PC resonators. In addition to the well-known nano-cavity resonator (NCR), we proposed hexagonal nano-ring resonators (NRR) of two different layout configurations. When a microcantilever under different force loads, both of the resonant wavelength and the resonant wavelength shift can be measured as a linear function of force load. The linear relationship between wavelength shifts and strain is observed as well. The minimum detectable force and detectable strain for NRR configuration 1 is derived as small as 0.0757 mu N and 0.0023%. The outstanding sensing capability renders PC resonators as a promising nanomechanical sensing element to be integrated in various transducers for NEMS applications. (c) 2010 Elsevier B.V. All rights reserved.
關聯:	SENSORS AND ACTUATORS A-PHYSICAL
显示于类别:	[光電科學與工程學系] 期刊論文

文件中的档案:

档案	描述	大小	格式	浏览次数
index.html		0Kb	HTML	531	检视/开启

在NCUIR中所有的数据项都受到原著作权保护.

社群 sharing

数据加载中.....