High-Performance AlGaN/GaN Schottky Diodes With an AlGaN/AlN Buffer Layer

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Title:	High-Performance AlGaN/GaN Schottky Diodes With an AlGaN/AlN Buffer Layer
Authors:	Lee,GY;Liu,HH;Chyi,JI
Contributors:	電機工程學系
Keywords:	BREAKDOWN VOLTAGE;SURFACE-STATES;GAN FILMS;RECTIFIERS;DISLOCATIONS
Date:	2011
Issue Date:	2012-03-28 10:14:46 (UTC+8)
Publisher:	國立中央大學
Abstract:	High-performance AlGaN/GaN Schottky barrier diodes are fabricated on a composite AlGaN/AlN buffer layer with low screw-type and high edge-type dislocation densities. Without edge termination, the devices with 30-mu m anode-to-cathode spacing exhibit a high breakdown voltage (V(B)) of 3489 V, a low leakage current (I(R)) of less than 0.2 mu A at -2000 V, and a low specific on-resistance (R(on)) of 7.9 m Omega . cm(2), resulting in a figure of merit (V(B)(2)/R(on)) as high as 1.54 GW/cm(2). Their switching characteristics as revealed by the reverse-recovery transient waveform exhibit a short reverse-recovery time of 17 ns.
Relation:	IEEE ELECTRON DEVICE LETTERS
Appears in Collections:	[電機工程學系] 期刊論文

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