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    Please use this identifier to cite or link to this item: http://ir.lib.ncu.edu.tw/handle/987654321/61464

    Title: 2D疊紋掃描系統;2D scanning system by using moir?
    Authors: 郭文淵;Kuo,Wen-yuan
    Contributors: 光機電工程研究所
    Keywords: 疊紋;差動訊號;表面輪廓;Moir?;differential signal;surface profile
    Date: 2013-08-27
    Issue Date: 2013-10-08 15:12:55 (UTC+8)
    Publisher: 國立中央大學
    Abstract: 本論文提出一套新的二維量測系統-「2D疊紋量測系統」,利用兩個線性光柵,配合光學系統以及待測物反射光的特性,得到其疊紋圖案。因其待測物位置的不同,得到的疊紋圖案也不同,因而藉由此現象,開發出一套2D疊紋量測系統。
    In this paper, a new two-dimensional measurement system which we call the 2D scanning system by using moir? have been presented. It uses two linear gratings、optical system、and the reflected light from the sample to get the moir? pattern. The different moir? patterns come from the different distances of the sample. We use that characteristic to develop the 2D scanning system.
    The moir? pattern refers to geometrical interference fringes, and is formed by two gratings that lie in contact, with small angle between two linear gratings. As a result, when a collimation laser goes through the first linear grating, it will be reflect by the sample. When it comes back to the optical system again, it will go through the second linear grating and become the moir? pattern. There are three kind of distance:focus、far focus、and near focus. They will decide the slope of moir? pattern. We use that characteristic to develop the moir? detect system. We combine the moir? detect system and two motors to scan the sample, and will get the three-dimensional pattern about two-dimensional surface.
    We control the experimental environment in the same objective. According to the experimental data, the sensitivity is 1.6(mm-1) when the grating pitch is 0.2mm in the work distance
    The sensitivity is 1.1(mm-1) when the grating pitch is 0.3mm in the work distance. The motor step distance is smaller, the experimental data will be more. We also can get more accurate datas. The users can decide the experimental specifications and parameters according to what you need.
    This system combines the moir? effect, differential signal and the motors to make the three-dimensional pattern about two-dimensional surface pattern. This system has great potential in defects and size of 2D and 3D measurement technique.
    Appears in Collections:[光機電工程研究所 ] 博碩士論文

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