| 摘要: | 研究期間：10108~10207;Micro-electrochemical(EMM), also known as electrolytic machining, is one of the nontraditional machining. The merits of EMM can be listed as: (1) Any metal material despites of its hardness and strength can be machined by EMM, (2) the tool will not be worn and there in no residual stress left on the workpiece surface, (3) the repeating tolerance is high. In recent years, the requirement on the micro-pin is highly increased due to the developments in micro-electronic devices and bio-medical applications. Micro pin is generally manufactured by electronic discharging machining or laser machining. However, both machining yield residual stress on the workpiece surface , and the cost is high while the efficiency is low. The surface roughness and hardness can be improved if EMM is applied. The application of EMM will be extended to the fabrication of probe of scanning electron microscopic if accuracy of nanometer is achieved. The present proposal is the extension of our previous research. The main purpose is firstly to fabricate the micro-scale electrodes (pins) by electrochemical machining. In experimental aspects, the existing ECM machining which we designed and set up before will be modified to include the rotating mechanism. The effect of working factors, such as: current density, electrolyte concentration, applied voltage, electrodes gap, rotating speed of cathodes, and pulsed frequency, on the shape of micro pin will be investigated. The first part will concentrate on the influence of drawing speed of the tool on the shape of work-piece under various working conditions to fabricate a micro-pin with conical tip, which should be as tiny as that can be used in the Atomic force microscope. In the second part, we will focus on how to fabricate a screw micro pin, and use it to drill through a metal plate to verify that a screw micro pin has better accuracy and performance than a cylindrical micro pin. |
