掃描式曝光機光源模組設計與驗證;Design and verification of a light module for a scanning-type exposure device

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题名:	掃描式曝光機光源模組設計與驗證;Design and verification of a light module for a scanning-type exposure device
作者:	孫晧格;Sun,Hao-Ge
贡献者:	光機電工程研究所
关键词:	光場函數;UV-LED曝光機;掃描式曝光機;平行曝光機;印刷電路板曝光機;LED陣列;發散角度;照度均勻度;light field function;UV-LED exposure device;scanning-type exposure device;collimating exposure device;printed circuit board exposure device;LED array;divergence angle;illumination uniformity
日期:	2014-08-25
上传时间:	2014-10-15 14:42:38 (UTC+8)
出版者:	國立中央大學
摘要:	本論文主要在設計LED掃描式曝光機的光源模組，並實際製造、組裝與量測驗證，設計開發目標為：發散角度的半高半寬（半高全寬的一半）≤4.0°；照度均勻度（量測之最小照度與最大照度比值）≥90%。為了方便製造與節省成本，本研究用白光發光二極體（LED）替代紫外線發光二極體（UV-LED），進行設計與驗證。首先，我們採用我們設計之半高半寬為3.6°的LED二次光學透鏡進行單一LED光源光場函數化研究。接著再利用完成之光場函數，進行LED陣列的光場研究，尋找出使LED陣列垂直照射在曝光工作平面上，照度均勻度達到目標以上之較佳照度均勻度的參數條件。最後設計實驗，製作與選購相關實驗設備，驗證模擬結果。我們利用單一LED光源光場函數，使用撰寫程式計算LED陣列垂直照射在曝光工作平面上光場的照度分布，得到當光源間距3.5cm和光源垂直高度16.0cm時，具有較佳照度均勻度。最後經實驗驗證，照度均勻度可達96.5%。根據研究結果顯示，我們使用的LED掃描式曝光機的架構配合這套研究技術，可以有效應用在印刷電路板曝光機上，達到UV-LED掃描式平行曝光機的商用規格目標。;In this thesis, the optical module of the light-emitting diode (LED) scanning-type exposure device is designed and verified. The research targets are taken as:, half of the full-width half-maximum (FWHM) angle ≤4.0°, and the illumination uniformity ≥90%. For easy making and cost down, we replace ultraviolet light-emitting diode (UV-LED) with LED to design and verify. First, we use a secondary optical lens which half of FWHM is 3.6° to function the light field of a LED. Then using the function of the light field, we research the LED array to find parameters of the better illumination uniformity which is ≥90%. Finally, we design the experiment to verify the results of simulation. We use the function of the light field to get the illumination distribution on the work platform of exposure device. According the result, when the light distance is 3.5 cm and the light perpendicular hight is 16.0 cm, it is the better illumination uniformity. The experiment result verified that the illumination uniformity is 96.5%. The research result indicated that the research technology, which used in the LED scanning exposure device, could effectively apply in the printed circuit board exposure device to reach the commercial specifications in the UV-LED scanning exposure device.
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