目前普遍觀測石墨烯的方法為石墨烯生長完後，使用原子力顯微 鏡(Atomic Force Microscope， AFM)、掃描式電子顯微鏡(Scanning Electron Microscope， SEM)、穿透式電子顯微鏡(Transmission Electron Microscope，TEM)觀測石墨烯晶粒，卻無法觀測成長中的石墨烯。 本研究主要目標在快速升溫系統(Rapid Thermal Process, RTP)上 觀測石墨烯生長，使用長焦距光學顯微鏡做為觀測鏡頭，再以生長在 銅箔上的石墨烯使用光學顯微鏡的暗場與長焦距光學顯微鏡系統的 暗場影像相互比較。為此目標，採用光學顯微鏡與長焦距顯微鏡相同 倍率 100 倍做比較分析。使用工作距離 180mm 之長焦距顯微鏡的暗 場效果在 RTP 上升溫至 700 度以內，皆可觀測到已生長的石墨烯， 本研究成功地在 RTP 上使用長焦距光學顯微鏡的暗場模式觀測到石 墨烯。;Graphene is the popular materials that get the attention in recent years. It is also known as monolayer graphite with hexagonal honeycomb structure of carbon atoms, the thickness of graphene is equal to an atom. It possesses good electrical properties, high transmittance and high thermal conductivity. Some research shows most of the instruments is used to observe graphene after growing graphene, such as atomic force microscope (AFM), scanning electron microscope (SEM), and transmission electron microscope (TEM). But these instruments can’t observe the graphene. In order to observe the growth graphene on the rapid thermal process (RTP) system, in this study, the long focal length optical microscope with dark field system is put above rapid thermal process system as an observation. After compared the image of optical microscope with dark field, the results shows it is successful to observe the growth graphene in 700 ℃ at 100 x magnifications with working distance 180mm.
