本論文主旨為透過光學薄膜設計和熱蒸鍍製程，製作出兼具高穿透率和低片電阻的透明導電膜，作為有機發光二極體(OLED)電極之應用。本論文之透明導電膜為三層結構(介電層/金屬/介電層，DMD)，在設計上藉由光學模擬軟體『Macleod』，針對OLED的發光波段，優化各層厚度以獲取高穿透光譜。另一方面，在使用薄金屬(~10 nm)的厚度下，本論文利用晶種層的鍍製來提昇電極的導電率。 本論文分成兩個部分: (1) 模擬倒置結構OLED的透明陽極，針對紅藍綠三種發光波段的元件，在優化條件下發光峰值穿透率可達90 %。實際製作的上電極其穿透率可達80 %而片電阻值約13.6 Ω/sq。(2) 模擬一般結構OLED並使用此DMD結構作為透明陰極，使一般元件具備透明且上下出光的效果。實際製作則使用NPB/Alq3 OLED元件搭配透明陰極，上下出光比可達3:4，而陰極電極片電阻為40 Ω/sq。 本論文証實DMD結構可用於製作透明陽極和透明陰極，未來可進一步應用於透明的有機光電元件。 ;The purpose of this thesis is to fabricate a transparent conductive film with high transmittance and low sheet resistance through the optical thin film design and the thermal evaporation process, as the application of the transparent electrodes in organic light-emitting diode (OLED). In this thesis, we investigate a transparent conductive electrode with a tri-layer structure (dielectric/metal/dielectric, DMD), designed by the optical simulation software ‘Macleod’ to optimize the thickness of each layer to obtain high transmittance for the emission spectrum of OLED. On the other hand, in the use of thin metal (~10 nm), the seed layer is utilized to enhance the electrode conductivity. This study is divided into two parts: (1) The transparent anode of inverted OLEDs is simulated. For three kinds of RGB devices, the transmittance of the peak wavelength of the emission spectrum under the optimized condition is up to 90%. In experiment, the evaporated top anode shows the transmittance up to 80% and the sheet resistance about 13.6 Ω/sq. (2) The normal OLED with DMD structure as the transparent cathode is simulated, such that the device exhibits transparency and bi-directional emission. In experiment, the NPB/Alq3 OLED with transparent cathode is fabricated. The ratio of front and back side emission is about 3:4, and the sheet resistance of cathode is 40 Ω/sq. Our study demonstrates that the DMD structure can be used to make transparent anode and cathodes, and it can be further applied for the transparent organic optoelectronic devices in the future.
