隨著攜帶式裝置的發展，儲存能源的需要也隨之而來。微型超級電容器(MSCs)由於擁有由電極結構所造就的高面積及體積比電容而引發了關注。而使用了可撓透明基材作為主體的超級電容器不只可以適用於輕薄化裝置中有限的空間，且與傳統超級電容器相比下對裝置透明度影響較少。 在此研究中，我們使用雲母作為基材，石墨烯以濕轉印製程轉移至基板表面，用以作為可撓且透明的電流收集層，再以濺鍍製程將銀及氧化鉬交互層疊而成的功能層沉積其上。製備完成的元件可達到的最高體積比電容值為14.91 (F/cm3)，由穩定度測試可知經過10000圈的重複充放電後，比電容值並未有明顯衰退，展現了良好的循環穩定度。同時也進行了可撓曲性質的相關測試，在不同程度彎曲條件下，進行了循環伏安的測試。由測試結果可知，元件擁有好的可撓程度，因其CV曲線在不同條件的彎曲下，並未發現有明顯的變化。重複撓曲測試顯示了以石墨烯作為電流收集層的微型超電容與以金作為電流收集層相比擁有較佳抗疲勞能力，在經過1000次重複撓曲後，CV曲線及EIS量測結果並未有顯著改變。 本研究指出了擁有優異機械性質的電流收集層材料對於可撓超級電容器的抗疲勞能力有重大影響。石墨烯為一種公認相比於大部分金屬，擁有較好機械性質的材料，因此以石墨烯製成之元件相比於以金製成之元件，對於疲勞有著較佳的抵抗能力。這些結果也表明了我們的設計與製程在微型固態儲能系統的應用端有著一定的潛力。;With the development of the portable device moving on, the needs of small-scale energy storage significantly increase. Micro-supercapacitors (MSCs) have attracted interests due to their high areal and volumetric capacitance that is dependent upon their electrode structure. MSCs based on flexible transparent substrates can not only adapt to the limited space for the micro-devices but also maintain the transparency comparing to the traditional supercapacitors. In this study, we use mica as MSC substrates. Graphene materials were transferred onto mica as flexible and transparent current collector and the function layer was formed by using layered Ag and MoOx structures, which were based on previous studies in our laboratory. The MSC device shows the highest volumetric capacitance of 14.91 (F/cm3), also presents a great cycle stability which remains most of capacitance after a large cycling number of 10000 times. Bending tests for MSC reliability were also introduced. We have tested the flexibility of the MSC devices with different bending conditions. The results show that our MSC devices have good flexibility. Repeated bending tests show the MSC devices with the graphene current collector have better durability to fatigue comparing to those with Au collector, since the CV curves show almost no change after repeated bending. This work indicates that an electrode material with good mechanical properties is crucial to achieving flexible supercapacitors with high fatigue durability. Graphene is a material which can be considered having better mechanical properties compares to most metals. These experimental results suggest that our MSC micro-devices show great promise for applications in integrated energy storage for all solid-state microsystems technologies.
