阻抗調制器在雜訊參數量測應用的訊源牽引系統與功率參數量測應用的負載牽引系統中是不可或缺的微波元件。可以覆蓋整個Smith Chart的泛用式阻抗調制器大致上可分為以下幾種架構：殘段式、負載傳輸線式，與double-slug式。其中，由double-slug式阻抗調制器的操作原理給予我們的啟發是，系統化的阻抗調制器設計方式可將之切分為可調變壓器與相位偏移器兩部分。理想上，可調變壓器僅用於調整反射係數的大小，而相位偏移器則僅用於改變其角度。本計畫「以鐵電積體被動元件製程實現基於全通網路之射頻阻抗調制器」之目的為開發可均勻覆蓋Smith Chart四個象限的全積體化泛用式阻抗調制器。我們將阻抗調制器分為兩部分來設計：可調變壓器與相位偏移器；我們預計以具磁耦合之全通網路來實現這兩種電路。此外，我們也將以本實驗室開發的含鐵電可變電容之積體被動元件製程來製作所設計的電路本研究計畫預計以一年的時間來完成。前期四個月的重點在於鐵電積體被動元件製程的開發；中期四個月的重點為電容、電感、電阻的製作與量測及電路的分析與設計。後期四個月的重點是可調變壓器、相移器、阻抗調制器的製作與量測。本計畫之成果預計將以一全積體化3.5-GHz的泛用式阻抗調制器來呈現。 ;Impedance tuners are indispensable microwave components in either source-pull systems used for noise characterization or load-pull systems used for power characterization of transistors. A general-purpose impedance tuner that provides uniform coverage over the 4 quadrants of the Smith Chart are often implemented using one of the following circuit topologies: stub-based, loaded-line, and double-slug. Among them, the way how the double-slug tuner operates gives us an insight that systematic design of an impedance tuner can be divided into two parts: the design of a variable transformer and the design of a phase shifter. Ideally, the variable transformer only alters the magnitude of the reflection coefficient whereas the phase shifter only changes its angle.The goal of the proposed project, namely, “Radio-Frequency Impedance Tuners Based on All-Pass Networks Realized Using a Ferroelectric Integrated Passive Device Process,” is to develop a fully-integrated general-purpose impedance tuner that provides uniform coverage over the 4 quadrants of the Smith Chart. The design of the impedance tuner is divided into two parts: a variable transformer and a phase shifter. Both the variable transformer and the phase shifter will be implemented using magnetically coupled all-pass networks (MCAPNs). Moreover, we will use a home-made integrated passive device (IPD) process that features ferroelectric varactors to realize the impedance tuner. Finally, we plan to apply the impedance tuner to an adaptive impedance matching system.We plan to finish the proposed project in 1 year. In the first 4 months, we will focus on the development of the ferroelectric IPD process. In the middle 4 months, we will work on the fabrication and measurement of the capacitors, inductors, and resistors, as well as the analysis and design of the proposed circuits. In the last 4 months of the project period, the focus will be on the fabrication and measurement of the variable transformer, the phase shifter, and the impedance tuner. A fully-integrated 3.5-GHz impedance tuner will be presented at the end of the project to summarize the research and development efforts.
