隨著科技發展，攜帶式與穿戴式之電子設備大量生產，舉凡行動裝置與穿戴式活動感應器等設備皆對人類生活習慣帶來巨大影響。然而，能源的消耗隨之增加，電化學儲能裝置的需求也日益增加。其中，可撓性固態微型超級電容器不僅擁有傳統超電容優異的功率密度與儲電能力，更可輕薄化裝置用於有限的空間。 在此研究中，我們使用聚亞醯胺(Polyimide，PI)作為可撓基材，將蒸鍍製程之金銀膜層結構進行合金化與去合金化製程，得到多孔金(Nanoporous-gold，NPG)結構，作為電流收集層。再以濺鍍製程將氧化鉬作為活性物質，進而製備出指叉式微型超電容。製備完成之元件在0.01 mA/cm2 電流密度下，可達到之最高體積比電容值為88.24 F/cm3。經過10000圈穩定度測試之重複充放電後，比電容值維持率為83.54 %，代表試片具有一定的穩定度可多次充放電使用。同時也進行可撓性質之相關測試。在不同彎曲曲率下，進行循環伏安的測試。由測試結果可知，因元件之循環伏安曲線在不同曲率的彎曲下，並未發現有明顯的變化，故元件擁有好的可撓性質。 活性材料的高導電性對於金屬氧化物的擬電容實現高的比電容以及功率和能量密度至關重要。基於金銀膜層電極具備一定之性能，本研究將多孔金電極鍍一層銀薄膜，希望藉此提升效能，結果表示多孔金電極鍍銀能使比電容由78.89提升至88.24 F/cm3。 經過改良後之元件展現一定水準之電化學性能，表示多孔金鍍銀之設計有助於提升效能。結果顯示，本研究所設計之表面與製程在微型固態儲能系統具有巨大的潛力。 ;With the development of technology, many portable and wearable electronic devices have been produced and have a great impact on human living habits. However, the consumption of energy has increased, the requirement for electrochemical energy storage devices has also increased. Flexible solid-state micro-supercapacitors (MSCs) not only have the excellent power density and storage capacity, but also can be used in a limited space. In this work, we use Polyimide as flexible substrates. First, the alloying and de-alloying process of the gold-silver film of the vapor-deposited process is carried out to obtain a nanoporous-gold (NPG) structure as a current collector. Second, a molybdenum oxide is used as an active material in a sputtering process to prepare a finger-type MSC. The MSC device shows the highest volumetric capacitance of 88.24 F/cm3, and the capacitance remains about 83.54 % after a large cycling number of 10000 times. Bending tests are also introduced in this work. Under different bending conditions, the results show that the cyclic voltammetry curves of the device don’t change obviously. This represents that our MSC device has good flexibility. This work indicates that high conductivity of active materials is important for high specific capacitance and power density of metal oxides. Based on the gold-silver film electrodes have great performance, we coat the porous gold electrode with a silver film by sputtering. The results show that the volumetric capacitance increases from 78.89 to 88.24 F/cm3. The improved MSC device demonstrates great electrochemical performance. Therefore, the surface and process designed by this work have great potential in micro-solid energy storage systems.
