Fabrication and Characterization of Electrostatic and Electromagnetic MEMS Vibration Energy Harvesters;Fabrication and Characterization of Electrostatic and Electromagnetic MEMS Vibration Energy Harvesters

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题名:	Fabrication and Characterization of Electrostatic and Electromagnetic MEMS Vibration Energy Harvesters;Fabrication and Characterization of Electrostatic and Electromagnetic MEMS Vibration Energy Harvesters
作者:	宮田正三;Miyata, Shozo
贡献者:	光機電工程研究所
关键词:	微機電系統;能量擷取;電磁式;靜電式
日期:	2020-04-01
上传时间:	2020-06-05 17:12:03 (UTC+8)
出版者:	國立中央大學
摘要:	本論文提出了頻率可調的駐極體靜電式能量擷取器和寬頻帶電磁式能量擷取器。其中靜電式元件由彈簧和三角梳狀電極組成，由於梳狀電極之間的靜電力會影響樑的運動，因此可藉由彈簧軟化作用，降低元件的共振頻率。電磁式元件的部分，模擬了線圈的尖端位移、感應電壓與輸出功率。最後比較了靜電式和電磁式能量收集器的性能。;This paper reports a frequency-tunable electret electrostatic (ES) vibration-based microelectromechanical systems energy harvester and wide bandwidth electromagnetic (EM) energy harvester. For ES type, the proposed device consists of folded-beam springs and triangular-comb electrodes. The electrostatic force between combs affects the movement of the beams, lowering the resonant frequency due to the spring softening effect. The device (size: 2 cm × 2 cm × 750 µm) was fabricated using a conventional microfabrication process. The harvester was charged to about 204 V through a bias temperature procedure and an oxidization process. The resonant frequency was controlled by changing the angle of the shaker on which device was mounted, which changed the initial gap between combs. The experimental results showed that the resonant frequency could be tuned from 54.1 to 55.9 Hz and that the power output was 8.4 µW at maximum and more than 2.7 µW at an acceleration of 7 mGRMS with the optimal resistance of 6 MΩ. A normalized power density of 204 mW/cm3/G2 was achieved. For EM type, the displacement of the tip of the coil, inductive voltage and the optimal output power of 1-DOF and 2-DOF EM energy harvester were simulated. The simulation successfully realizes the same order of the experimental results for all. With written energy harvesters, the performance of the ES and EM energy harvester based on the scaling method was compared and it was found that the tendency of the theory proposed by trimmer and reported harvesters match.
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