矽基高分子聚合物之四波長陣列波導光柵多工器研究;Study on Multiplexers of 4-Wavelength Polymer Arrayed Waveguide Grating Based on Silicon Substrate

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题名:	矽基高分子聚合物之四波長陣列波導光柵多工器研究;Study on Multiplexers of 4-Wavelength Polymer Arrayed Waveguide Grating Based on Silicon Substrate
作者:	康敬亞;Kang, Ya-Jing
贡献者:	光電科學與工程學系
关键词:	粗波分多工;高分子聚合物;陣列波導光柵;CWDM;Polymer;Arrayed Waveguide Grating
日期:	2020-01-16
上传时间:	2020-06-05 17:12:13 (UTC+8)
出版者:	國立中央大學
摘要:	本論文提出適用於粗波分多工(Coarse Wavelength Division Multiplexing)系統之四波長高分子聚合物陣列波導光柵(Arrayed Waveguide Grating)多工器。傳輸端不使用透鏡將四個波長之雷射光耦合進入矽基高分子聚合物陣列波導光柵多工器中，設計將雷射、四波長高分子陣列波導光柵多工器整合於同一平台之光學引擎。由模擬結果得到:本實驗室所設計的高分子聚合物陣列波導光柵多工器，四個通道的中心波長分別為1.271微米、1.291微米、1.311微米及1.331微米，與理論設計相差約1奈米。波長為1.291微米和1.311微米之通道在沒有任何優化結構的情況下，插入損耗小於3 dB，波長為1.271微米和1.331微米之通道，插入損耗小於4 dB。經半導體製程，將所製作之高分子聚合物鐘形彎曲光波導進行結構尺寸及光學耦合效率之量測。實際量測到高分子聚合物鐘形光波導平均寬度為6.7微米與設計值7微米有著平均4.29%的誤差，光波導平均高度為5.68微米與設計值7 微米有著平均18.81%的誤差。而高分子聚合物鐘形彎曲光波導耦合效率之模擬值與實際量測值有著平均45.56%的誤差。 ;In this thesis, we proposed a four-wavelength polymer-based arrayed waveguide grating (AWG) multiplexer developed on a silicon substrate, which are suitable for the Coarse Wavelength Division Multiplexing (CWDM) system. The direct butt-joint coupling without micro-lens is adopted for four-wavelength laser chips at the input ports of polymer-based AWG multiplexer developed on silicon substrate. The numerical simulation results show the central wavelengths of four lanes are 1.271, 1.291, 1.311, and 1.331 micrometer, respectively. The simulated values are approximately 1 nanometer away from theoretical ones. The simulated insertion losses are less than 3 dB at lanes operated at wavelengths of 1.291 and 1.311 micrometer. For the lanes operated at wavelengths of 1.271 and 1.331 micrometer, the insertion losses are less than 4 dB. The curved polymer optical waveguides are fabricated to study the optical performance. Although the rectangular contour is designed for original waveguides, however bell-shaped optical waveguides are obtained due to over exposure in photo-lithography process. The average measured width of end facets of optical waveguides is 6.7 micrometer, it has an error of 4.29% as compared to the design value of 7 micrometer. While the average measured height of end facets of optical waveguides is 5.68 micrometer, it has an error of 18.81% as compared to the design value of 7 micrometer. The difference of measured insertion losses of bell-shaped optical waveguides is 45.56% as compared to the simulated value.
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