多自由度運動軌跡的量測對工具機與機器手臂的空間位置校正非常重要。雷射干涉儀具有長距離與高解析度等優越的性能，是目前多自由度運動軌跡的主要量測工具。但是由於雷射光線的直線傳播性質，待測物體的移動範圍被限制在光線可抵達的區域，因此必須透過不同方式將光線導引到物體的位置上，這也讓量測程序變得複雜。為解決當前量測多自由度運動系統所面臨的問題，本計畫首先以光柵繞射原理為基礎，並結合既有之波長調制外差干涉技術，提出一種創新的「繞射偏振干涉技術」，應用於「三維運動量測」與「姿態角量測」。此外，本計畫亦提出一種創新的「波前分光式恆星干涉儀」，以克服待測物體的移動範圍被限制的問題，達到多自由度運動的量測及校正目的。 ;The measurement of multi-degree-of-freedom motion is very essential for the calibration of the space position of the machine tools and robot arms. The laser interferometer has excellent performances such as long measurement range and high measurement resolution, and it is the main measurement tool for multi-DOF motion. However, due to the linear propagation properties of the laser light beam, the location of the object is limited to the area where the light beam can reach. Therefore, the light must be directed to the position of the object by the rotation device, and it complicates the measurement process.To solve the current problems of measuring multi-degree-of-freedom motion systems, based on the grating diffraction and combined with the wavelength-modulated heterodyne interferometers, an innovative "diffraction polarization interferometry" is proposed for the measurements of 3D displacements and Euler angles. Also, this project proposes an innovative "wavefront division stellar interferometer" to overcome the limited motion range of the object and to achieve the measurement and calibration of multi-degree-of-freedom motion.
