在本論文中，我們使用了去離子水清洗以及在大氣下進行熱處理的方式，得到了原子級平坦的SrTiO3(100)單晶基底。並且透過低能電子繞射、歐傑電子能譜術、X光光電子能譜術以及掃描穿隧式電子顯微鏡量測其表面重構、元素組成以及表面形貌在整個處理過程中所發生的變化。在經歷過兩次的熱處理以及一次的去離子水清潔過後，SrTiO3(100)單晶的表面重構由最初的(1×1)轉變為c(6×2)的結構。其表面原本所存在的碳元素等汙染皆顯著減少，並且可以看到其表面形貌十分的平整，然而表面的c(6×2)結構上方覆蓋著尺寸約2-3奈米的團簇。除此之外，我們在此樣品上嘗試進行鉍的蒸鍍以及使用離子濺射的清潔方式，發現在經過蒸鍍、濺射之後可以透過再次重複熱處理及去離子水的清潔流程使樣品表面回復c(6×2)的結構。;In this thesis, we produce an atomically flat single crystal surface by deionized water etching and thermal treatment under atmosphere. We use Low Energy Electron Diffraction (LEED), Auger Electron Spectroscopy (AES), X-ray Photoelectron Spectroscopy (XPS) and Scanning Tunneling Microscopy (STM) to study the evolution of the surface reconstruction, surface composition and the surface topography during the cleaning process. After two heat treatments and one deionized water etching, the surface reconstruction of SrTiO3(100) single crystal is changed from (1×1) to c(6×2). The carbon and other contaminates on the surface are reduced significantly, and the surface topography can be seen atomically flat. However, the c(6×2) structure on the surface is covered with clusters of about 2-3 nanometers in size. In addition, we tried to evaporate bismuth on this sample and try to clean it by argon ion sputtering. We found that after the evaporation and sputtering, the surface of the sample can be restored to the c(6×2) structure by repeating the heat treatment and deionized water cleaning process.
