石英振盪器?泛出現於各種電子產品，其主要功能為提供設備穩定的時脈訊號使設備可以進行量測、通訊等功能，是不可或缺的電子元件。而隨著5G時代的來臨，愈來愈多的通訊需要達到高速度、低時延等需求，也因此對於石英振盪器的工作條件也更加嚴苛，此時石英振盪器的振動型態也會逐漸變得複雜，因此成為製造商設計商目前所面臨的問題。本研究由理論出發，以有限元素軟體COMSOL針對以厚度剪切模態作為主模態的AT Cut石英振盪器進行模擬與分析。本研究包含石英振盪器的設計參數分析，找出各個設計參數對於模態的影響；此外，本研究也在電極上加入鑽孔，藉此分析鑽孔的各個設計參數對於系統響應的影響；最後，藉由加入石英的各個非線性特性進入模型中進而分析石英的激勵功率依賴性，以分析石英在高功率驅動時對於系統響應的影響，此外也藉由修改材料常數為溫度函數進行溫度效應分析。數值結果顯示，除了石英與電極的厚度對於系統的頻率與Q值有最高的敏感度外，電極的長度與寬度對於頻率也有不可忽略的影響。鑽孔的深度達到石英時對於主模態的Q值會有顯著的影響，而當鑽孔的位置愈遠離中心時其對於系統的影響也會愈小。而非線性的數值結果顯示當電壓大於一定值時，系統在同一頻率下會出現多解。溫度效應分析結果與文獻的數值有差距。;Quartz oscillators are commonly found in various electronic devices. Their primary function is to provide the clock signal for the devices performing measurement, communication, and other functions. With the advent of the 5G era, the requirements of high speed and low latency rely on quartz oscillators with higher frequency. To find better designs of quartz oscillators, this research used the FEM software COMSOL for simulating the dynamic characteristics and performing parametric studies of mainly the dimensions of the oscillator. Our findings also include the influence of unwanted modes and the effect of drilling holes on the electrode. Nevertheless, nonlinear finite element models have been developed to analyze the Drive Level Dependency (DLD) of quartz oscillators. Finally, analysis of temperature effect is performed by modified the material constants to a function of temperature. The numerical results shows that not only the changes of the thickness of quartz blank and electrode strongly impact either frequency or Q factor, the length and width of electrode also have a significant influence on the frequency of the oscillator. Next, the diameter of the hole affect frequency drift positively. The depth of hole affect Q-factor significantly when penetrating the quartz. Moreover, the result of DLD analysis shows that multiple resolutions is found on certain frequency when applied voltage is too high. Finally, the result of the analysis of temperature effect shows that, comparing to reference, there is a nonneglected difference on value is observed.
