基於偏振與干涉術之六自由度幾何誤差量測技術開發;Development of Six-Degree-Of-Freedom Geometric Error Measurement Technology Based on Polarization and Interferometry

NCUIR > Engineering College > Departmant of Mechanical Engineering > Research Project > Item 987654321/90470

Please use this identifier to cite or link to this item: http://ir.lib.ncu.edu.tw/handle/987654321/90470

Title:	基於偏振與干涉術之六自由度幾何誤差量測技術開發;Development of Six-Degree-Of-Freedom Geometric Error Measurement Technology Based on Polarization and Interferometry
Authors:	李朱育
Contributors:	國立中央大學機械工程學系
Keywords:	幾何誤差;偏振;干涉;雙折射;六自由度;;Geometric error;polarization;Interference;birefringence;6 degree-of-freedom
Date:	2023-03-08
Issue Date:	2023-03-08 15:51:33 (UTC+8)
Publisher:	科技部
Abstract:	本計畫所開發的量測系統改善了傳統干涉儀體積大架構複雜等問題，同時具備傳統干涉儀高精度的特性，更擁有小體積的優勢。在工程上能夠以輕巧的架構，在空間有限的情況下，對製程設備進行幾何誤差量測及補償，進而提升產品品質，增加產業競爭力。
Relation:	財團法人國家實驗研究院科技政策研究與資訊中心
Appears in Collections:	[Departmant of Mechanical Engineering ] Research Project

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