藍光鈣鈦礦 LED可由氯化物和溴化物混合物製備。 此外,可以通過莫爾 比來調節發光波長。然而,混合 Cl/Br鈣鈦礦容易因結構缺陷而引起相分離, 從而導致光致發光的量子效率降低以及藍光鈣鈦礦 LED波長紅移的不穩定性。 因此藍光鈣鈦礦 LED的效率遠低於綠光和紅光。 而目前大多數藍光鈣鈦礦 LED都添加了有機成分,以減少結構缺陷並 提高 LED效率; 但有機鈣鈦礦 LED很容易受環境影響而導致效率的不穩定使 元件壽命減少,而全無機鈣鈦礦 LED相對而言穩定性較高。 出於商業考慮,本研究介紹了全無機藍光鈣鈦礦 LED製 程,通過使用雙源 順序熱蒸發和基板加熱來製備全無機混合鹵化物 CsPbBr3-xClx薄膜。 此外,本 研究還比較了不同熱處理和非熱處理真空熟成的方法。對 CsPbBr3-xClx薄膜進 行不同溫度和時間的熱處理和光致發光量子效率的比較,本研究最後在兩種不 同製程條件下達到最佳效率: :(i)在 300℃退火 40分鐘,波長 476nm亮度達到 1537nits (ii)未退火且老化 68小時,波長 476nm亮度達到 178.6nits。此研究 實現節能並 在未來能 有效應用於軟性基板上。;Blue perovskite LEDs can be prepared by chloride and bromide mixture. Moreover, the wavelength of light emission is able to adjust by molar ratio. However, mixed Cl/Br perovskite easily phase separation induce by structure defect, which lead the quantum efficiency of photoluminescence reduction and the instability for blue perovskite LEDs wavelength shift. So blue perovskite LEDs efficiency is much lower than green and red light. So far, most of the blue perovskite LEDs have added organic components for structure defect reduction and improved LEDs efficiency; however, moisture induced device lifetime degradation might easily occur on organic blue perovskite LEDs and less impact on all-inorganic blue perovskite LEDs. For commercial concern, This study introduced all-inorganic blue perovskite LEDs process by using dual-source sequential thermal evaporation and substrate heating to prepare all-inorganic mixed halide CsPbBr3-xClx thin films. Besides, we also compare different heat treatment and non-heat treatment vacuum aging methods. Based on CsPbBr3-xClx films with different temperature and duration time thermal process and photoluminescence quantum efficiency compare, we consult the process condition with the components (i) annealed at 300°C for 40 minutes, wave length 476nm brightness reached 1537 nits; (ii) non-annealed and with 68hrs aging, wave length 476nm brightness reached 178.6 nits. Based on our study to achieve energy saving and can be effectively applied to flexible substrates in the future.