雙光束偏振干涉術應用於滾轉與俯仰角位移量測;Dual Beam Polarization Interferometry for Roll and Pitch Angular Displacement Measurement

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题名:	雙光束偏振干涉術應用於滾轉與俯仰角位移量測;Dual Beam Polarization Interferometry for Roll and Pitch Angular Displacement Measurement
作者:	張書菡;Chang, Shu-Han
贡献者:	光機電工程研究所
关键词:	滾轉角量測;俯仰角量測;雙折射晶體;偏振干涉解相技術;偏振相機;Roll angular displacement measurement;Pitch angular displacement measurement;birefringent crystals;polarization interference;polarization camera
日期:	2024-08-20
上传时间:	2024-10-09 15:36:01 (UTC+8)
出版者:	國立中央大學
摘要:	本研究開發一種「雙光束偏振干涉術應用於滾轉與俯仰角位移量測」技術，改善傳統的旋轉誤差量測技術缺乏滾轉角的量測，有效克服現有技術在量測範圍受限、易受環境變化影響、體積過大及系統結構過於複雜等問題。本技術使用雙折射晶體作為量測元件，以偏振相機解析由晶體角位移引起的相位變化。並模擬在固定滾轉與俯仰角下，雙光束入射晶體所產生的相位變化關係曲線，以此做為依據將相位差量測值轉換為精確的滾轉與俯仰角位移量。在一系列量測實驗中，利用電控旋轉平台的回傳值與量測值進行誤差分析，同時透過重複性實驗確認系統的穩定性。本研究通過實驗評估系統的解析度及非線性週期性誤差，並對系統架構可能引起的誤差進行分析與提出解決辦法。實驗證實，本系統在6°的量測範圍內能精確地同時量測滾轉與俯仰角位移，其量測解析度分別達到2.9 arcsec與21.6 arcsec。;This research develops a technique of “Dual Beam Polarization Interferometry for Roll and Pitch Angular Displacement Measurement”, addressing the deficiencies of traditional rotational error measurement methods that lack the capability for roll angle measurement. This technique effectively overcomes the limitations of existing technologies, such as restricted measurement range, susceptibility to environmental changes, excessive size, and overly complex system structures. The method uses a birefringent crystal as the measurement component, with a polarization camera analyzing the phase differences variations caused by the crystal′s angular displacement. By simulating the incidence of dual beams on the crystal at fixed roll and pitch angles, the resulting phase differences variation relationship curves are analyzed. These curves serve as a basis for converting measured phase differences into precise roll and pitch angular displacements. In a series of measurement experiments, error analysis is conducted by comparing the feedback values from an electronically controlled rotary stage with the measured values, while repeatability experiments are used to confirm the system′s stability. This study evaluates the system′s resolution and nonlinear periodic errors through experiments and analyzes potential errors introduced by the system′s architecture, proposing solutions to these issues. The experiments demonstrate that within a 6° measurement range, the system can accurately measure roll and pitch angular displacements, achieving measurement resolutions of 2.9 arcseconds and 21.6 arcseconds, respectively.
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