| 摘要: | 本研究針對磁控濺鍍機台實施預防性保養作業（Preventive Maintenance, PM）的探討。定期性的預防性保養作業是改善微粒污染產品最有效方法之一，本研究關注於噴砂製程。噴砂是高壓下將磨料強行推向工件表面，用以清潔或影響其表面形貌的操作。高生產效率、低消耗量、高回收性及低排放等要求，被視為噴砂磨料需要具備的特徵，鋁氧化物評估為可行的選項之一。研究也探討噴砂壓力及磨料粒度等參數對表面粗糙度的影響。實驗結果顯示，當噴砂壓力為20 psi、磨料粒度為#36使用白色氧化鋁磨料（實驗組 #2），對表面粗糙度顯著改善。該組合將預防性保養的頻率從7次延長至10次，並且維持產品外觀良率大於75%。經濟效益方面，鋁氧化物磨料的替代使用可降低採購成本58%，廢棄物處理成本下降77%，同時減少30%溫室氣體排放。現行碳化矽磨料在硬度(9.5 mohs )、熱導率及化學穩定性佳的優勢，在許多應用中仍然是首選。但存在使用時游離二氧化矽百分比含量高與廢棄物回收問題不容忽視，現行規範依其他一般廢棄物進行回收掩埋處理，處理費用高。此外，由於合法廢棄物掩埋場缺乏，不肖業者進行非法傾倒與掩埋，對自然環境與生活空間造成嚴重破壞。因此本研究旨在評估鋁氧化物(Aluminum Oxide)磨料對勞工安全、廢棄物可回收性及經濟效益方面的優勢，同時也對現存問題提出解決方案。
關鍵詞：微粒、噴砂、鋁氧化物、磁控濺鍍、預防性保養作業;This study investigates the implementation of preventive maintenance (PM) operations for magnetron sputtering systems. Periodic preventive maintenance is one of the most effective methods to improve particulate contamination in products, with a particular focus on the sandblasting process. Sandblasting involves forcibly projecting abrasive material onto the surface of a workpiece under high pressure to clean or alter its surface morphology. Requirements such as high production efficiency, low consumption, high recyclability, and low emissions are considered essential characteristics for sandblasting abrasives. Aluminum oxide has been evaluated as a feasible alternative. The study also explores the effects of sandblasting pressure and abrasive particle size on surface roughness. Experimental results indicate that when the sandblasting pressure is 20 psi and the abrasive particle size is #36 using white aluminum oxide abrasive (Experimental Group #2), there is a significant improvement in surface roughness. This combination extends the preventive maintenance frequency from 7 to 10 times while maintaining a product appearance yield rate greater than 75%. In terms of economic benefits, the substitution with aluminum oxide abrasive can reduce procurement costs by 58%, waste disposal costs by 77%, and greenhouse gas emissions by 30%. While silicon carbide abrasive currently remains the preferred choice in many applications due to its high hardness (9.5 Mohs), thermal conductivity, and chemical stability, issues such as high free silica content during use and waste recovery problems cannot be ignored. Current regulations require disposal of these wastes as general waste through landfill, which incurs high processing costs. Additionally, due to a lack of legal landfill sites, unscrupulous operators engage in illegal dumping and burial, causing severe damage to the natural environment and living spaces. Therefore, this study aims to evaluate the advantages of aluminum oxide abrasives in terms of worker safety, waste recyclability, and economic benefits, while also proposing solutions to existing problems.
Keywords : Particles, Sandblasting, Sputtering, Aluminum Oxide, Preventive Maintenance |
