本研究設計一三軸磁通閘磁力計，利用磁通傳導器將出平面磁場導入至平面磁芯，透過不同線圈間訊號變化及彼此正交之平面磁芯達到不同軸向之磁場量測。本研究增加輸入激發訊號之頻率，提升各軸感測靈敏度，透過量測地磁，由訊號變化分析元件旋轉角度，並結合控制器，將感測訊號輸入控制器進行訊號處理。 磁通閘磁感測器同平面X軸在0~110 μT的線性範圍內，靈敏度為7343 V/T；同平面Y軸在0~100 μT的線性範圍內，靈敏度為7164 V/T；出平面Z軸在0~500 μT的線性範圍內，靈敏度為1605 V/T。 ;This study proposes a planar fluxgate magnetometer. A flux concentrator is used to direct the out-of-plane magnetic field into the planar magnetic core, allowing for the measurement of different axial magnetic fields. The study increases the frequency of the input excitation signal to enhance the sensitivity of each axis. By measuring the geomagnetic field and analyzing signal variations, the rotation angle of the device is determined. A controller is also integrated to process the sensor signals. The fluxgate magnetic sensor demonstrates a sensitivity of 7343 V/T for the in-plane X-axis within a linear range of 0-110 μT, a sensitivity of 7164 V/T for the in-plane Y-axis within a linear range of 0-100 μT, and a sensitivity of 1605 V/T for the out-of-plane Z-axis within a linear range of 0-500 μT.
