| 摘要: | 本研究於銅基板與玻璃基板上鍍覆鋁、銀、銅三種元素組成之金屬薄膜，透過調控銀含量以形成結晶與非晶結構，並搭配製備雙層奈米複合薄膜，探討其對電阻率、機械性質與耐腐蝕性的影響。鍍膜總厚度約為1.2微米，使用低掠角X光繞射分析儀（GIXRD）、四點探針、奈米壓痕（Nanoindentation）、穿透式電子顯微鏡（TEM）及塔佛極化測試（Tafel corrosion test）等技術進行分析。實驗結果顯示，當Ag含量介於30%至40%時，薄膜呈現非晶結構；超過40%則形成結晶結構，且晶粒尺寸隨Ag含量增加而增大。導電度方面，非晶結構的Al46經RTA處理後電阻率最低為97.89 μΩ·cm，部分結晶結構的Al65為39 μΩ·cm，而高銀含量的Al28最低可達25 μΩ·cm，優於純鎳與純銅薄膜。機械性質方面，雙層Al28薄膜硬度為6.32 GPa、楊氏模數為72.85 GPa，H³/E²達0.0475 GPa，硬度為純銅的3倍、純金的4倍，H³/E²則分別為其16倍與80倍。耐腐蝕性方面，非晶Al46薄膜的腐蝕阻抗最高為8.54×10⁶ Ω·cm²，雙層薄膜Al28也展現優異的耐蝕性（4.59×10⁶ Ω·cm²），為純銅的1.25倍。綜合而言，Al28雙層奈米複合薄膜展現出優異的導電性、機械強度與耐腐蝕性能。;In this study, Al-Ag-Cu metallic thin films were deposited on copper and glass substrates via DC magnetron sputtering. By tuning the Ag content, both crystalline and amorphous metallic films can be achieved. In addition, bilayer nanocomposite thin films were fabricated to investigate their effects on electrical resistivity, mechanical properties, and corrosion resistance. The total film thickness was approximately 1.2 μm. Characterization techniques included grazing incidence X-ray diffraction (GIXRD), four-point probe measurement, nanoindentation, transmission electron microscopy (TEM), and Tafel corrosion testing. Results of XRD analysis showed that metallic films with 30–40% Ag content tended to form amorphous structures, while those metallic films with Ag above 40% would form partially crystalline structure.Meanwhile, with increasing grain size as Ag content increased. In terms of electrical performance, amorphous Al46 metallic film exhibited a minimum resistivity of 97.89 μΩ·cm after rapid thermal annealing, partially crystalline Al65 metallic film reached 39 μΩ·cm, and high-Ag-content Al28 metallic film achieved the lowest resistivity of 36 μΩ·cm—significantly better than pure Ni (141 μΩ·cm) and Cu (42 μΩ·cm). For mechanical performance, the Al28 bilayer showed the highest rigidity, with a hardness of 6.32 GPa, Young’s modulus of 72.85 GPa, and H³/E² of 0.0475 GPa, this is three times harder than pure copper and four times harder than pure gold respectively. Meanwhile, the toughness is 16 and 80 times higher than pure copper and pure gold, respectively. In corrosion resistance, the amorphous Al46 film had the highest impedance (8.54×10⁶ Ω·cm²), while the Al28 bilayer also demonstrated excellent performance (4.59×10⁶ Ω·cm²), 1.25 times higher than that of pure copper. Overall, the Al28 bilayer nanocomposite thin film exhibited superior electrical, mechanical, and corrosion-resistant properties. |
