本研究旨在發展一套以全像干涉術為基礎之即時光學檢測技術，用以觀察奈米級形貌變化。實驗中使用綠光雷射作為照明光源，結合光學干涉原理與高解析 CCD 成像系統，搭建可即時觀測微小變異的光學檢測模型。研究分為兩部分：第一部分探討陶瓷杯加入熱水後，因空氣熱膨脹造成的折射率變化，透過干涉條紋的變動呈現空氣場中熱擾動的行為；第二部分則針對平面與 L 型金屬板，以電烙鐵進行局部加熱，觀測其因熱應力產生的微形變。實驗結果顯示，系統能有效辨識微形貌變化對干涉條紋的影響，並呈現出熱源條件與幾何形狀不同情況下的變形行為。該系統具備非接觸、高靈敏與即時觀測等優勢，驗證其於熱變形與結構行為檢測之可行性，未來可應用於微尺度熱管理與材料穩定性評估等領域。;This study aims to develop a real-time optical inspection technique based on holographic interferometry for observing nanoscale morphological changes. A green laser was used as the illumination source, and an optical inspection system was constructed by integrating optical interference principles with a high-resolution CCD imaging system, enabling real-time observation of subtle variations. The research is divided into two parts: the first part investigates the refractive index changes caused by thermal expansion of air when hot water is poured into a ceramic cup. These changes are visualized through variations in interference fringes, revealing the behavior of thermal disturbances in the air field. The second part focuses on planar and L-shaped metal plates subjected to localized heating using a soldering iron to observe the micro-deformations induced by thermal stress. Experimental results demonstrate that the system effectively detects the influence of minute morphological changes on interference fringe patterns and reveals deformation behaviors under different thermal sources and geometric conditions. With advantages such as non-contact measurement, high sensitivity, and real-time observation, the system′s feasibility for thermal deformation and structural behavior monitoring is validated. It holds potential for future applications in microscale thermal management and material stability assessment.
