本論文主要研究在"金屬-絕緣體-金屬"(Metal-insulator-metal, MIM)波導系統中耦合圓形及梯形共振腔可得到具有Fano 共振的共振波長；並比較層狀結構與非層狀結構在折射率響應、靈敏度（S）及品質因數(FOM) 方面的差異， 將其傳輸特性採用有限元素法(Finite element method, FEM)進行數值模擬研究。 針對本文所提出的結構，研究發現透過改變系統中材料的折射率及結構幾何參數，即可輕鬆調整 Fano 共振的共振波長，特別的是在特定的厚度下，靈敏度可進一步增強，並超過原結構。;This study focuses on investigating the Fano resonance characteristics in metal-insulator-metal (MIM) waveguide systems integrated with circular and trapezoidal resonant cavities. Specifically, it compares layered and non-layered structures regarding their refractive index response, sensitivity (S), and figure of merit (FOM), subsequently analyzing their impacts on transmission properties. The finite element method (FEM) is employed for numerical simulations of the proposed structures. The findings reveal that by adjusting material refractive indices and geometric parameters within the system, the resonance wavelength of the Fano resonance can be precisely tuned. Notably, the sensitivity performance significantly improves by modifying the thickness of specific layers, surpassing that of the original non-layered structures.
